VACTRA-Pinnacle is RAON Robotics' eight-axis, dual-arm vacuum robot for semiconductor-wafer transfer. Its four hands are independently controlled, supporting scissor motion and multi-wafer handling within a compact rotation envelope for high-vacuum process equipment.
About
VACTRA-Pinnacle is RAON Robotics' eight-axis dual-arm vacuum robot for semiconductor-wafer transfer. Four independently controlled hands support scissor motion and multi-wafer handling within a compact rotation envelope.
The robot is designed for high-vacuum process equipment. Reach, wafer size, cleanliness and interface requirements depend on the selected VACTRA-Pinnacle configuration and fabrication tool.
Semiconductor equipment makers and fabs