VACTRA-Q is RAON Robotics' seven-axis vacuum robot for transferring semiconductor wafers in high-vacuum process environments. Its four arms can operate independently, combining a compact cylindrical body with a long radial stroke for multi-wafer handling inside fabrication equipment.
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VACTRA-Q is RAON Robotics' seven-axis vacuum robot for semiconductor-wafer transfer. Four arms can operate independently, combining a compact cylindrical body with a long radial stroke for multi-wafer handling.
The system integrates inside high-vacuum fabrication equipment. Reach, wafer format, cleanliness and control interface remain tied to the specified VACTRA-Q configuration.
Semiconductor equipment makers and fabs