VACTRA-Q Context

Audience

Semiconductor equipment makers and fabs

Workflow

Transfer wafers between semiconductor process modules

Specifications

• Axes: 7 axes
• Body Size: Ø312 × 935 mm body
• Reach Mm: R-axis stroke up to 960 mm centre-to-centre
• Vertical Lift Mm: 150 mm Z-axis stroke

Tags

• Peer Group: Semiconductor Wafer-Transfer Robot