Fabmatics launches HERO Scout for automated reticle handling
Fabmatics introduced the HERO Scout autonomous mobile robot for flexible transport and handling of reticle pods in semiconductor cleanrooms.
Evidence notes
- The system uses a six-axis collaborative arm to load and unload mask load ports from 200 mm to 1,700 mm high.
- Its compact 660 by 580 mm footprint, differential drive and 3D cameras support navigation through narrow cleanroom aisles.
- The technical sheet specifies ISO 2 cleanroom certification, two onboard buffers, SLAM-based commissioning and inductive on-the-fly charging.